DEVICE AND METHOD FOR ULTRASONIC CLEANING

PROBLEM TO BE SOLVED: To stably operate an ultrasonic oscillation element without requiring a complicated structure and circulation of a large quantity of cleaning solvent, and to easily clean both upper and lower surfaces of an object to be cleaned. SOLUTION: An ultrasonic cleaning part has an upper cleaning solvent supplying nozzle 12 and a lower cleaning solvent supplying nozzle 14. The upper cleaning solvent supplying nozzle 12 supplies an upper surface cleaning solvent 13 to the upper surface of a glass substrate 11. The lower cleaning solvent supplying nozzle 14 supplies a lower surface cleaning solvent 15 to the lower surface of the substrate 11 as a shower irradiated with ultrasonic waves. An oscillation element which oscillates the ultrasonic waves irradiating the lower surface cleaning solvent 15 is installed in a circulation passage for the cleaning solvent 15, which passage extends from the upstream side to the downstream side, in the direction between the horizontal direction and the upward direction.