OPTICAL MEMBER, ITS MANUFACTURE, AND ALIGNER USING OPTICAL DEVICE

PROBLEM TO BE SOLVED: To prevent the occurrence of outgassing affecting a lens characteristic by covering a face touching a space where exposure energy passes by means of the coat of metal or a ceramic, which is formed by thermal spraying. SOLUTION: A lens-barrel 16 and a connection barrel 18 are ma...

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Bibliographische Detailangaben

Hauptverfasser:	NAKAMURA KYOJI, AKAGAWA KATSUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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