IMAGE DISPLAY METHOD OF SCANNING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To realize an image display method of a scanning electron microscope capable of quantitatively observing the state of unevenness of the surface of a sample. SOLUTION: X-Y two-dimensional coordinates of a signal detected in conjunction with two-dimensional scanning of a predeter...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	YAMADA MITSUGI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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