IMAGE DISPLAY METHOD OF SCANNING ELECTRON MICROSCOPE

IMAGE DISPLAY METHOD OF SCANNING ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To realize an image display method of a scanning electron microscope capable of quantitatively observing the state of unevenness of the surface of a sample. SOLUTION: X-Y two-dimensional coordinates of a signal detected in conjunction with two-dimensional scanning of a predeter...

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1. Verfasser: YAMADA MITSUGI
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Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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description PROBLEM TO BE SOLVED: To realize an image display method of a scanning electron microscope capable of quantitatively observing the state of unevenness of the surface of a sample. SOLUTION: X-Y two-dimensional coordinates of a signal detected in conjunction with two-dimensional scanning of a predetermined region on a sample 4 are transformed into rhombus coordinates by an affine transformer 22. As a result, a rhombus-shaped image is displayed on a cathode-ray tube 15. An electron beam is linearly and repeatedly scanned at two end positions in the predetermined region on the sample 4, the focus of the electron beam is changed in a predetermined range during the process of the repetitive scanning, and a signal obtained from the sample for every focus is displayed, by displacing it at an end position corresponding to the scanning of the electron beam of the rhombus-shaped image.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title IMAGE DISPLAY METHOD OF SCANNING ELECTRON MICROSCOPE
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