CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To provide a charged particle beam device reducing load of a host computer for smoothly performing processing. SOLUTION: A focusing ion beam device 101 is connected to a LAN 109 in a plant through a LAN. A host computer 102, an optical system control unit 103 controlling a focu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MATSUMURA HIROSHI, MURAMATSU MASAJI, DOI TOSHIO, FUJII TOSHIAKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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