OBLIQUE INCIDENT INTERFEROMETER

PROBLEM TO BE SOLVED: To match paths of both a reference light and an object beam with a simple constitution by arranging a path matching means at one of a light separator and a light synthesizer and a diffraction grating at the other, constituting the means of two mirrors non-parallel with each oth...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HIZUKA MASATOSHI, KOBAYASHI FUMIO, SAITO TAKAYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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