TOTAL INTERNAL REFLECTION(TIR) HOLOGRAPHY DEVICE, ITS METHOD AND USED OPTICAL ASSEMBLY

PROBLEM TO BE SOLVED: To provide a total internal reflection(TIR) holography system device, its method and an optical instrument used in the TIR holography device. SOLUTION: The optical instrument is provided with a plate 23 consisting of a material capable of transmitting light used in a lithograph...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAN WOOSUNG, CARNAL OLIVIER
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHIC PROCESSES OR APPARATUS HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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