FLUSSO DI PROCESSO PER LA REALIZZAZIONE DI MEMORIE NON VOLATILI CON RIMOZIONE DIFFERENZIATA DELL'OSSIDO SACRIFICALE

Flow process for producing non-volatile memories with differentiated removal of the sacrificial oxide in the NO-DPCC diagram including a series of steps that permit the removal of the oxide in two distinct moments from the matrix area and from the circuitry area. In this manner the active circuitry...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SEVERGNINI CARLO, PANSANA PIETRO, RAVAZZI LEONARDO
Format:	Patent
Sprache:	ita
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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