GIROSCOPIO MEMS CON CALIBRAZIONE DEL FATTORE DI SCALA IN TEMPO REALE E RELATIVO METODO DI CALIBRAZIONE

The MEMS gyroscope (30) has a mobile mass (31) carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure (32) is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure (33A, 33B) is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal (S) having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature calibration movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.