SENSORE DI VELOCITA' DI ROTAZIONE E PROCEDIMENTO PER IL FUNZIONAMENTO DI UN SENSORE DI VELOCITA' DI ROTAZIONE

SENSORE DI VELOCITA' DI ROTAZIONE E PROCEDIMENTO PER IL FUNZIONAMENTO DI UN SENSORE DI VELOCITA' DI ROTAZIONE

A yaw rate sensor includes a substrate which has a main plane of extension and a Coriolis element which is movable relative to the substrate. The yaw rate sensor has an excitation arrangement for exciting a drive oscillation of the Coriolis element along a first direction parallel to the main plane...

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Hauptverfasser: GOMEZ UDO-MARTIN, BALSLINK THORSTEN, GECKELER CARSTEN
Format: Patent
Sprache:ita
Schlagworte:
GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
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creator GOMEZ UDO-MARTIN
BALSLINK THORSTEN
GECKELER CARSTEN
description A yaw rate sensor includes a substrate which has a main plane of extension and a Coriolis element which is movable relative to the substrate. The yaw rate sensor has an excitation arrangement for exciting a drive oscillation of the Coriolis element along a first direction parallel to the main plane of extension. The yaw rate sensor has a detection arrangement for detecting a Coriolis deflection of the Coriolis element along a third direction which is perpendicular to the main plane of extension. In addition, the yaw rate sensor has a quadrature compensation structure which includes a comb electrode structure and a plate capacitor structure.
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subjects GYROSCOPIC INSTRUMENTS
MEASURING
MEASURING DISTANCES, LEVELS OR BEARINGS
NAVIGATION
PHOTOGRAMMETRY OR VIDEOGRAMMETRY
PHYSICS
SURVEYING
TESTING
title SENSORE DI VELOCITA' DI ROTAZIONE E PROCEDIMENTO PER IL FUNZIONAMENTO DI UN SENSORE DI VELOCITA' DI ROTAZIONE
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