Distortion reduction in a multi-beam imaging system

A system may include a controller couplable to an imaging sub-system utilizing multiple particle beams, where the imaging sub-system includes one or more control elements to manipulate the two or more particle beams that are adjustable with two or more control parameters. The controller may select v...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHRIYAN Sameet K, COOK Michael, DOWLING David
Format:	Patent
Sprache:	eng ; heb
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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