System and method for inspection by failure mechanism classification and identification in a charged particle system

Apparatuses, systems, and methods for providing beams for classifying and identifying failure mechanisms associated with a sample of charged particle beam systems. In some embodiments, a method may include analyzing a first plurality of voltage contrast images of a sample to identify a plurality of...

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Hauptverfasser:	SUNG Yun A, DILLEN Hermanus Adrianus, WOESSNER Achim, CORRADI Antonio, NIKOLSKI Pioter, SONG Younghoon
Format:	Patent
Sprache:	eng ; heb
Online-Zugang:	Volltext bestellen
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