Separable multiple illumination sources in optical inspection

The utility model relates to a system for inspection object. System for inspection object can include the sensing module, the beam splitter, objective, the light field shines the injection die piece, disposes for the light field light beam that generates first predefine parameter and with the light...

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Hauptverfasser: ITAY COHEN, NOAM GORDON, AMIR TZHORI
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Sprache:eng ; heb
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creator ITAY COHEN
NOAM GORDON
AMIR TZHORI
description The utility model relates to a system for inspection object. System for inspection object can include the sensing module, the beam splitter, objective, the light field shines the injection die piece, disposes for the light field light beam that generates first predefine parameter and with the light field light beam beam splitter that leads, the injection die piece is shone in the details in a play not acted out on stage, but told through dialogues, disposes for the first details in a play not acted out on stage, but told through dialogues light beam that generates second predefine parameter and with the first details in a play not acted out on stage, but told through dialogues light beam object that leads, first predefine parameter and second predefine parameter have the difference, the light field light beam is reflected for (a) to the object to the beam splitter configuration, (B, ) the reflection of receipt light field light beam, (c) receives the reflection of first details in a play not acted out on stage, but told through dialogues light beam with the reflection direction objective of light field light beam, (d), and (e) is with the reflection direction objective of first details in a play not acted out on stage, but told through dialogues light beam, the objective configuration is the reflection direction sensing module of reflection with first details in a play not acted out on stage, but told through dialogues light beam and light field light beam, sensing module configuration is distinguishing the reflection of first details in a play not acted out on stage, but told through dialogues light beam and the reflection of light field light beam based on the difference of first predefine parameter and second predefine parameter.
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title Separable multiple illumination sources in optical inspection
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