Substrate processing apparatus

An apparatus for coating substrates by vapour deposition consists of a plurality of work stations in each of which is mounted an apertured mask which may be brought accurately into alignment with a substrate, a source of vaporizable material and a monitor slide which is coated at the same time as th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	THEODOSEAU NICHOLAS, CORMIER FRANCIS SELMA DE, KAHAN GEORGE JULIUS, SILVA EDWARD M. DA
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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