Apparatus and methods for measuring a surface of a sample

In one arrangement, a surface follower 8 is configured to interact with a local portion 10 of a surface 4 of a sample 6 such that a position along a first axis of an interrogation surface of the surface follower depends on a position along the first axis (axis Z) of the local portion of the surface...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	David Charles Milne
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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