Method for aligning arrays of optical fibers

A method for manufacturing an array of optical fiber ferrules includes producing on a first side of a wafer a pattern of an array of disks or holes (111, 112) in a metallic coating (121, 122). The metallic coating is covered with a negative photoresist layer. A second side of the wafer opposite to t...

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Bibliographische Detailangaben
Hauptverfasser: Neta Arad-Vosk, Bruno Sfez, Netanel Malka
Format: Patent
Sprache:eng
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Zusammenfassung:A method for manufacturing an array of optical fiber ferrules includes producing on a first side of a wafer a pattern of an array of disks or holes (111, 112) in a metallic coating (121, 122). The metallic coating is covered with a negative photoresist layer. A second side of the wafer opposite to the first side is illuminated with light that propagates as a divergent or collimated beam through the photoresist layer, thereby creating a conical pattern within the photoresist layer. The photoresist layer is developed to create conical apertures. A sheet with a conical openings pattern registered to the conical apertures is attached so that a small diameter of each conical opening of the sheet is smaller than, and in contact with, a large diameter of the conical aperture to which it is registered, thereby forming an array of optical fiber ferrules.