Workpiece transfer and printing

A printing apparatus for printing workpieces such as wafers comprises a rotary table 4 supporting first and second platens 7, 8 rotatable between a loading position, L, located in-line between input and output production lines. The transfer apparatus is operable to cyclically perform first and secon...

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Bibliographische Detailangaben

Hauptverfasser:	Chris Hawkins, Richard Jeffrey Willshere
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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