Poling of a piezoelectric thin film element in a preferred electric field driving direction

A piezoelectric thin film element is provided comprising a first electrode 26; a piezoelectric layer 24 formed on said first electrode; and a second electrode formed 22 on said piezoelectric layer. The piezoelectric layer is poled, by applying a poling electric field across said piezoelectric layer...

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Bibliographische Detailangaben

Hauptverfasser:	Michael Hook, Peter Mardilovich, Silvia Marson, Susan Trolier-Mckinstry, Charalampos Fragkiadakis, Song-Won Ko
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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