Apparatus for evacuating a corrosive effluent gas stream from a processing chamber

An apparatus for evacuating a gas stream of corrosive fluid exhausted from a processing chamber, comprises a dry pumping arrangement 22, a liquid ring pump 26, a separator 34 and an abatement arrangement 40. The liquid ring pump 26 is arranged for evacuating the gas stream of corrosive fluid from th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Darren Mennie, Jack Raymond Tattersall, Christopher Bailey, Michael Roger Czerniak, Ingo Stephen Graham, Gary Peter Knight, Darek Martin Baker, Duncan Michael Price, Andrew James Seeley, Clive Marcus Lloyd Tunna
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS SEPARATION TRANSPORTING WEAPONS
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