Surface measurement apparatus and method

A metrological apparatus has a mover (9) to carry out a measurement by effecting relative movement in a measurement direction between a workpiece support surface (16) and a stylus (11) such that the stylus is deflected as a stylus tip of the stylus follows surface variations along a measurement path...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	DANIEL IAN MANSFIELD
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING HANDLING RECORD CARRIERS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS TESTING
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