Surface measurement apparatus and method

Surface measurement apparatus and method

A metrological apparatus has a mover (9) to carry out a measurement by effecting relative movement in a measurement direction between a workpiece support surface (16) and a stylus (11) such that the stylus is deflected as a stylus tip of the stylus follows surface variations along a measurement path...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: DANIEL IAN MANSFIELD
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A metrological apparatus has a mover (9) to carry out a measurement by effecting relative movement in a measurement direction between a workpiece support surface (16) and a stylus (11) such that the stylus is deflected as a stylus tip of the stylus follows surface variations along a measurement path on a workpiece surface. A data processor is configured to determine a location of a centre of the stylus tip at measurement points along a measurement path on a surface of a workpiece, the stylus tip locations defining a stylus tip locus; and to determine a surface form of the surface being measured using the determined stylus tip locus.