Transitioned film growth for conductive semiconductor materials

A center region of conductive material/s may be disposed or "sandwiched" between transition regions of relatively lower conductivity materials to provide substantially low defect density interfaces for the sandwiched material. The center region and surrounding transition regions may in tur...

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Bibliographische Detailangaben
Hauptverfasser: MICHAEL F TAYLOR, ATHANASIOS J SYLLAIOS, SAMEER K AJMERA
Format: Patent
Sprache:eng
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