A micro-cantilever sensor for measuring fluid properties

A method of monitoring a reaction in, or a thermal property of, a fluid medium sample comprises providing at least one micro-cantilever sensor 300 further comprising at least two materials having different coefficients of thermal expansion and having a heater 310 and piezo-resistive sensor 320 integ...

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Bibliographische Detailangaben
Hauptverfasser: VLADISLAV DJAKOV, RICHARD JOHN DUNN
Format: Patent
Sprache:eng
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