Light condensing unit with guided movement mechanisms

A light condensing unit is located between a radiation source and a sample being analysed. The unit comprises a mirror 41 located on a holding shaft 6 that is arranged to collect light, such as cathode luminescence (cathodoluminescence), coming from the sample that is being irradiated. The unit comp...

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Bibliographische Detailangaben
Hauptverfasser: SHIGETOSHI ARAI, AWATA SHOGO
Format: Patent
Sprache:eng
Schlagworte:
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