Silicon-on-Insulator biosensor devices

A semiconductor device 1 for the detection of specific biomolecular interactions is based on Silicon-on-Insulator (SOI) technology. The device comprises a substrate 2 having an SOI structure and an in-plane-gate field-effect transistor (FET) 3. The substrate 2 has, from bottom to top, a bulk silicon...

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Bibliographische Detailangaben

Hauptverfasser:	GERHARD ABSTREITER, KARIN BUCHHOLZ, STEFAN RAUSCHENBACH, ANDREAS RICHARD BAUSCH, ERICH SACKMAN, MARC UWE TORNOW, MICHAEL GEROLD HELLMUT NIKOLAIDES, SEBASTIAN MARKUS LUBER
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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