Imaging system with interchangeable light sources

An imaging system (10) for imaging a substrate surface (14) at several imaging wavelengths comprises a replaceable beam generating module (36), a spinning mirror (34) and a controller (26). The beam generating module generates an imaging beam in dependence on beam command signals. The imaging beam h...

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Bibliographische Detailangaben
Hauptverfasser:	JOSEPH A WHEELER, DAVID P SOUIRES
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CALCULATING CINEMATOGRAPHY COMPUTING CORRECTION OF TYPOGRAPHICAL ERRORS COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY ELECTROGRAPHY HANDLING RECORD CARRIERS HOLOGRAPHY i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES MACHINES OR ACCESSORIES FOR MAKING, SETTING, OR DISTRIBUTINGTYPE MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHIC OR PHOTOELECTRIC COMPOSING DEVICES PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION PRESENTATION OF DATA PRINTING RECOGNITION OF DATA RECORD CARRIERS SELECTIVE PRINTING MECHANISMS STAMPS TRANSPORTING TYPE TYPEWRITERS
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