Elimination of strike-over in RF plasma guns

Strike-over in an RF plasma gun is eliminated by interposing a grounded isolation device between the plasma jet and the RF coil which supplies energy to the plasma. The isolation device comprises a plurality of separated segments spaced apart in a circumferential direction and electrically connected...

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Bibliographische Detailangaben
1. Verfasser:	GERHARD FRIND
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	Strike-over in an RF plasma gun is eliminated by interposing a grounded isolation device between the plasma jet and the RF coil which supplies energy to the plasma. The isolation device comprises a plurality of separated segments spaced apart in a circumferential direction and electrically connected together at one end and to ground potential. The shield substantially eliminates the parasitic distributed capacitance between the RF coil and the plasma by interrupting the electrical field coupling between the coil and the plasma and shunting most of the capacitive current flow to ground. The invention enables reliable operation of the device at frequencies in the 2-4 MHz range.