SUBMERGED STORAGE PLATE MEMORY CELL

PURPOSE: To provide a transistor storage cell which is highly immune to noises, without needing an epitaxial layer by facing the surface of a polycrystalline Si core formed in a trench, perpendicular to a substrate surface in a p-type region formed round the trench through a dielectric layer. CONSTI...

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1. Verfasser: DAEJE CHIN
Format: Patent
Sprache:eng
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