PROCEDE DE PROJECTION D'UN FAISCEAU DE PARTICULES SUR UN SUBSTRAT AVEC CORRECTION DES EFFETS DE DIFFUSION

A method for projecting a particle beam onto a substrate, the method includes a step of calculating a correction of the scattering effects of the beam by means of a point spread function modelling the forward scattering effects of the particles; a step of modifying a dose profile of the beam, implem...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	CONSTANCIAS, CHRISTOPHE
Format:	Patent
Sprache:	fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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