CAPTEUR INERTIEL ANGULAIRE MEMS FONCTIONNANT EN MODE DIAPASON

A vibrating inertial sensor is provided, micro machined in a plane thin wafer, allowing the measurement of an angular position or of an angular speed. The sensor comprises two vibrating masses suspended by springs with identical stiffness in X and Y and coupled together by identical stiffness spring...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHAUMET BERNARD, LEVERRIER BERTRAND, FILHOL FABIEN, ROUGEOT CLAUDE
Format:	Patent
Sprache:	fre
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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