CAPTEUR DE PRESSION ET DE TEMPERATURE BAS COUT COMPORTANT DES RESONATEURS SAW ET SON PROCEDE DE FABRICATION

CAPTEUR DE PRESSION ET DE TEMPERATURE BAS COUT COMPORTANT DES RESONATEURS SAW ET SON PROCEDE DE FABRICATION

A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type compri...

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Hauptverfasser: CHOMMELOUX LUC, MENAGE PHILIPPE
Format: Patent
Sprache:fre
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MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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creator CHOMMELOUX LUC
MENAGE PHILIPPE
description A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type comprising a piezoelectric substrate, characterized in that the first, the second and the third resonators are respectively on the surface of first, second and third individual piezoelectric substrates, each of the individual substrates being positioned on the surface of a common base section, locally machined away under said first resonator in such a manner as to liberate the substrate from said resonator so as to render it operational for the measurement of pressure. A method of fabrication for such a sensor is also provided.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_FR2965050B1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>FR2965050B1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_FR2965050B13</originalsourceid><addsrcrecordid>eNqNjMEKwjAQRHvxIOo_7A8IVangcRM32EOTsNnisRSJF0UL9f9xA36AsMwyw8xbVg-LUahnOBNEppTa4IGkWKEuEqP0TGAwgQ29qHQxsKAvlQS6CB4LIEHCa1lqoKRgSRF6Dg23FkW562pxH59z3vz-qgJHYi_bPL2HPE_jLb_yZ3C8Px2buqnN7vBH5QtFzjXo</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>CAPTEUR DE PRESSION ET DE TEMPERATURE BAS COUT COMPORTANT DES RESONATEURS SAW ET SON PROCEDE DE FABRICATION</title><source>esp@cenet</source><creator>CHOMMELOUX LUC ; MENAGE PHILIPPE</creator><creatorcontrib>CHOMMELOUX LUC ; MENAGE PHILIPPE</creatorcontrib><description>A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type comprising a piezoelectric substrate, characterized in that the first, the second and the third resonators are respectively on the surface of first, second and third individual piezoelectric substrates, each of the individual substrates being positioned on the surface of a common base section, locally machined away under said first resonator in such a manner as to liberate the substrate from said resonator so as to render it operational for the measurement of pressure. A method of fabrication for such a sensor is also provided.</description><language>fre</language><subject>MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; PHYSICS ; TESTING</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20130628&amp;DB=EPODOC&amp;CC=FR&amp;NR=2965050B1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20130628&amp;DB=EPODOC&amp;CC=FR&amp;NR=2965050B1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHOMMELOUX LUC</creatorcontrib><creatorcontrib>MENAGE PHILIPPE</creatorcontrib><title>CAPTEUR DE PRESSION ET DE TEMPERATURE BAS COUT COMPORTANT DES RESONATEURS SAW ET SON PROCEDE DE FABRICATION</title><description>A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type comprising a piezoelectric substrate, characterized in that the first, the second and the third resonators are respectively on the surface of first, second and third individual piezoelectric substrates, each of the individual substrates being positioned on the surface of a common base section, locally machined away under said first resonator in such a manner as to liberate the substrate from said resonator so as to render it operational for the measurement of pressure. A method of fabrication for such a sensor is also provided.</description><subject>MEASURING</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjMEKwjAQRHvxIOo_7A8IVangcRM32EOTsNnisRSJF0UL9f9xA36AsMwyw8xbVg-LUahnOBNEppTa4IGkWKEuEqP0TGAwgQ29qHQxsKAvlQS6CB4LIEHCa1lqoKRgSRF6Dg23FkW562pxH59z3vz-qgJHYi_bPL2HPE_jLb_yZ3C8Px2buqnN7vBH5QtFzjXo</recordid><startdate>20130628</startdate><enddate>20130628</enddate><creator>CHOMMELOUX LUC</creator><creator>MENAGE PHILIPPE</creator><scope>EVB</scope></search><sort><creationdate>20130628</creationdate><title>CAPTEUR DE PRESSION ET DE TEMPERATURE BAS COUT COMPORTANT DES RESONATEURS SAW ET SON PROCEDE DE FABRICATION</title><author>CHOMMELOUX LUC ; MENAGE PHILIPPE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_FR2965050B13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>fre</language><creationdate>2013</creationdate><topic>MEASURING</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>CHOMMELOUX LUC</creatorcontrib><creatorcontrib>MENAGE PHILIPPE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHOMMELOUX LUC</au><au>MENAGE PHILIPPE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CAPTEUR DE PRESSION ET DE TEMPERATURE BAS COUT COMPORTANT DES RESONATEURS SAW ET SON PROCEDE DE FABRICATION</title><date>2013-06-28</date><risdate>2013</risdate><abstract>A pressure and temperature sensor comprising comprises at least a first resonator of the SAW type comprising a piezoelectric substrate, thinned at least locally, of the membrane type, a second resonator of the SAW type comprising a piezoelectric substrate and a third resonator of the SAW type comprising a piezoelectric substrate, characterized in that the first, the second and the third resonators are respectively on the surface of first, second and third individual piezoelectric substrates, each of the individual substrates being positioned on the surface of a common base section, locally machined away under said first resonator in such a manner as to liberate the substrate from said resonator so as to render it operational for the measurement of pressure. A method of fabrication for such a sensor is also provided.</abstract><oa>free_for_read</oa></addata></record>
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subjects MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
title CAPTEUR DE PRESSION ET DE TEMPERATURE BAS COUT COMPORTANT DES RESONATEURS SAW ET SON PROCEDE DE FABRICATION
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-20T08%3A20%3A59IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=CHOMMELOUX%20LUC&rft.date=2013-06-28&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EFR2965050B1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true