PROCEDE DE REALISATION D'UNE STRUCTURE MULTICOUCHE AVEC DETOURAGE PAR EFFETS THERMOMECANIQUES

PROCEDE DE REALISATION D'UNE STRUCTURE MULTICOUCHE AVEC DETOURAGE PAR EFFETS THERMOMECANIQUES

The method involves clipping an edge of a plate (110) realized with a wheel (150) whose working surface (151) includes abrasive particles before thinning the plate, where average size of the abrasive particles is greater or equal to 800 mesh or lower or equal to 18 microns. The clipping of the edge...

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Hauptverfasser: VAUFREDAZ ALEXANDRE, MOLINARI SEBASTIEN
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Sprache:fre
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator VAUFREDAZ ALEXANDRE
MOLINARI SEBASTIEN
description The method involves clipping an edge of a plate (110) realized with a wheel (150) whose working surface (151) includes abrasive particles before thinning the plate, where average size of the abrasive particles is greater or equal to 800 mesh or lower or equal to 18 microns. The clipping of the edge is realized with lowering speed of the wheel, where the lowering speed of the wheel is greater than or equal to 5 micrometer per second. A descent of the wheel in the plate is stopped at height of a gluing interface, where the descent is lower than or equal to 30 micrometer. The plate is chosen from a silicon plate or sapphire plate or semiconductor on an insulator structure.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title PROCEDE DE REALISATION D'UNE STRUCTURE MULTICOUCHE AVEC DETOURAGE PAR EFFETS THERMOMECANIQUES
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