CAPTEUR D'ACCELERATION ET PROCEDE DE FABRICATION D'UN TEL CAPTEUR

a) Capteur d'accélération et procédé de fabrication d'un tel capteur.b) Capteur caractérisé en ce qu'on structure des chemins conducteurs (4) dans la troisième couche (3), qui sont reliés aux points de branchement (20), et les chemins conducteurs (4) sont isolés électriquement par rap...

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Hauptverfasser: BOHRINGER ALEXANDRA, LUTZ MARKUS, OFFENBERG MICHAEL, MUENZEL HORST, SCHUBERT DIETRICH, HEYERS KLAUS
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creator BOHRINGER ALEXANDRA
LUTZ MARKUS
OFFENBERG MICHAEL
MUENZEL HORST
SCHUBERT DIETRICH
HEYERS KLAUS
description a) Capteur d'accélération et procédé de fabrication d'un tel capteur.b) Capteur caractérisé en ce qu'on structure des chemins conducteurs (4) dans la troisième couche (3), qui sont reliés aux points de branchement (20), et les chemins conducteurs (4) sont isolés électriquement par rapport à la première couche (1) par la seconde couche (2) et par des cavités par rapport à la troisième couche (3). An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system. One exemplary application of the acceleration sensor includes mounting the acceleration sensor on a vibrational system of an rpm (rate-of-rotation sensor). This simplifies the manufacturing of an rpm sensor, since the vibrational system and the acceleration sensor are configured out of a three-layer system, wherein the conductor tracks are run into the frame of the rpm sensor in which the vibrational system is suspended, so as to allow excursion.
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An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system. One exemplary application of the acceleration sensor includes mounting the acceleration sensor on a vibrational system of an rpm (rate-of-rotation sensor). 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An acceleration sensor is composed of a three-layer system. The acceleration sensor and conductor tracks are patterned out of the third layer. The conductor tracks are electrically isolated from other regions of the third layer by recesses and electrically insulated from a first layer by a second electrically insulating layer. In this manner, a simple electrical contacting is achieved, which is configured out of a three-layer system. One exemplary application of the acceleration sensor includes mounting the acceleration sensor on a vibrational system of an rpm (rate-of-rotation sensor). This simplifies the manufacturing of an rpm sensor, since the vibrational system and the acceleration sensor are configured out of a three-layer system, wherein the conductor tracks are run into the frame of the rpm sensor in which the vibrational system is suspended, so as to allow excursion.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title CAPTEUR D'ACCELERATION ET PROCEDE DE FABRICATION D'UN TEL CAPTEUR
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