Capacitive pressure sensor with reference capacitances and method of obtaining the same (Machine-translation by Google Translate, not legally binding)

Capacitive pressure sensor with reference capacitance and method of obtaining it. The present invention is a sensor (1) of capacitive pressure with reference capacitances (13, 13 '), capable of being integrated monolithically in a microelectronic circuit. This pressure sensor (1) comprises: a f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BOHORQUEZ REYES, JUAN CARLOS, UNIGARRO CALPA, EDGAR ALBERTO, SEGURA-QUIJANO, FREDY ENRIQUE, ACHURY FLORIAN, ALVARO URIEL, RAMIREZ RODRIGUEZ, FERNANDO, SACRISTAN RIQUELME, JORDI
Format:	Patent
Sprache:	eng ; spa
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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