Capacitive pressure sensor with reference capacitances and method of obtaining the same (Machine-translation by Google Translate, not legally binding)
Capacitive pressure sensor with reference capacitance and method of obtaining it. The present invention is a sensor (1) of capacitive pressure with reference capacitances (13, 13 '), capable of being integrated monolithically in a microelectronic circuit. This pressure sensor (1) comprises: a f...
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| creator | BOHORQUEZ REYES, JUAN CARLOS UNIGARRO CALPA, EDGAR ALBERTO SEGURA-QUIJANO, FREDY ENRIQUE ACHURY FLORIAN, ALVARO URIEL RAMIREZ RODRIGUEZ, FERNANDO SACRISTAN RIQUELME, JORDI |
| description | Capacitive pressure sensor with reference capacitance and method of obtaining it. The present invention is a sensor (1) of capacitive pressure with reference capacitances (13, 13 '), capable of being integrated monolithically in a microelectronic circuit. This pressure sensor (1) comprises: a first sensor electrode (9) inserted in a layer of insulating material where also the reference capacitances (13, 13 '), two reference electrodes (10, 10') separated between they by the first sensor electrode (9), a hermetic cavity (12) superimposed on the first sensor electrode (9), two connecting walls (11) that confine the first electrode (9), to the two reference electrodes (10, 10 ') and the hermetic cavity (12), wherein this hermetic cavity (12) is covered by a second sensor electrode (8) which, when deformed by an external force, varies the capacitance. (Machine-translation by Google Translate, not legally binding)
Sensor de presión capacitivo con capacitancias de referencia y método de obtención del mismo. La presente invención es un sensor (1) de presión capacitivo con capacitancias de referencia (13, 13'), susceptible de ser integrado monolíticamente en un circuito microelectrónico. Este sensor (1) de presión comprende: un primer electrodo sensor (9) insertado en una capa de material aislante donde también se encuentran las capacitancias de referencia (13, 13'), dos electrodos de referencia (10, 10') separados entre ellos por el primer electrodo sensor (9), una cavidad hermética (12) sobrepuesta al primer electrodo sensor (9), dos muros de conexión (11) que confinan al primer electrodo (9), a los dos electrodos de referencia (10, 10') y a la cavidad hermética (12), en donde esta cavidad hermética (12) está cubierta por un segundo electrodo sensor (8) que cuando es deformado por una fuerza externa varía la capacitancia. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_ES2627013A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>ES2627013A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_ES2627013A13</originalsourceid><addsrcrecordid>eNqNjs1qwlAUhLPpQqzvMMsKCv5Auy6iduNK93KSTJIL13PCvccWX6TPa0AfwNUMwzfDjIr_jfRSBQ-_RJ-Y8zURmZot4S94h8SGiVoR1YOUwWeI1rjQO6thDax0CRq0hXdDXS7Ex0GqLijnnkRzFA-mKG_Ym7WROD1TzqDmiGwlxhvKoPUwM30v3hqJmZOnjgvstqfNz5y9nZmHI1T6eXtcfa6-Fsv193L9AnIHEBZQ4A</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Capacitive pressure sensor with reference capacitances and method of obtaining the same (Machine-translation by Google Translate, not legally binding)</title><source>esp@cenet</source><creator>BOHORQUEZ REYES, JUAN CARLOS ; UNIGARRO CALPA, EDGAR ALBERTO ; SEGURA-QUIJANO, FREDY ENRIQUE ; ACHURY FLORIAN, ALVARO URIEL ; RAMIREZ RODRIGUEZ, FERNANDO ; SACRISTAN RIQUELME, JORDI</creator><creatorcontrib>BOHORQUEZ REYES, JUAN CARLOS ; UNIGARRO CALPA, EDGAR ALBERTO ; SEGURA-QUIJANO, FREDY ENRIQUE ; ACHURY FLORIAN, ALVARO URIEL ; RAMIREZ RODRIGUEZ, FERNANDO ; SACRISTAN RIQUELME, JORDI</creatorcontrib><description>Capacitive pressure sensor with reference capacitance and method of obtaining it. The present invention is a sensor (1) of capacitive pressure with reference capacitances (13, 13 '), capable of being integrated monolithically in a microelectronic circuit. This pressure sensor (1) comprises: a first sensor electrode (9) inserted in a layer of insulating material where also the reference capacitances (13, 13 '), two reference electrodes (10, 10') separated between they by the first sensor electrode (9), a hermetic cavity (12) superimposed on the first sensor electrode (9), two connecting walls (11) that confine the first electrode (9), to the two reference electrodes (10, 10 ') and the hermetic cavity (12), wherein this hermetic cavity (12) is covered by a second sensor electrode (8) which, when deformed by an external force, varies the capacitance. (Machine-translation by Google Translate, not legally binding)
Sensor de presión capacitivo con capacitancias de referencia y método de obtención del mismo. La presente invención es un sensor (1) de presión capacitivo con capacitancias de referencia (13, 13'), susceptible de ser integrado monolíticamente en un circuito microelectrónico. Este sensor (1) de presión comprende: un primer electrodo sensor (9) insertado en una capa de material aislante donde también se encuentran las capacitancias de referencia (13, 13'), dos electrodos de referencia (10, 10') separados entre ellos por el primer electrodo sensor (9), una cavidad hermética (12) sobrepuesta al primer electrodo sensor (9), dos muros de conexión (11) que confinan al primer electrodo (9), a los dos electrodos de referencia (10, 10') y a la cavidad hermética (12), en donde esta cavidad hermética (12) está cubierta por un segundo electrodo sensor (8) que cuando es deformado por una fuerza externa varía la capacitancia.</description><language>eng ; spa</language><subject>MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; PERFORMING OPERATIONS ; PHYSICS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; TESTING ; TRANSPORTING</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170726&DB=EPODOC&CC=ES&NR=2627013A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170726&DB=EPODOC&CC=ES&NR=2627013A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BOHORQUEZ REYES, JUAN CARLOS</creatorcontrib><creatorcontrib>UNIGARRO CALPA, EDGAR ALBERTO</creatorcontrib><creatorcontrib>SEGURA-QUIJANO, FREDY ENRIQUE</creatorcontrib><creatorcontrib>ACHURY FLORIAN, ALVARO URIEL</creatorcontrib><creatorcontrib>RAMIREZ RODRIGUEZ, FERNANDO</creatorcontrib><creatorcontrib>SACRISTAN RIQUELME, JORDI</creatorcontrib><title>Capacitive pressure sensor with reference capacitances and method of obtaining the same (Machine-translation by Google Translate, not legally binding)</title><description>Capacitive pressure sensor with reference capacitance and method of obtaining it. The present invention is a sensor (1) of capacitive pressure with reference capacitances (13, 13 '), capable of being integrated monolithically in a microelectronic circuit. This pressure sensor (1) comprises: a first sensor electrode (9) inserted in a layer of insulating material where also the reference capacitances (13, 13 '), two reference electrodes (10, 10') separated between they by the first sensor electrode (9), a hermetic cavity (12) superimposed on the first sensor electrode (9), two connecting walls (11) that confine the first electrode (9), to the two reference electrodes (10, 10 ') and the hermetic cavity (12), wherein this hermetic cavity (12) is covered by a second sensor electrode (8) which, when deformed by an external force, varies the capacitance. (Machine-translation by Google Translate, not legally binding)
Sensor de presión capacitivo con capacitancias de referencia y método de obtención del mismo. La presente invención es un sensor (1) de presión capacitivo con capacitancias de referencia (13, 13'), susceptible de ser integrado monolíticamente en un circuito microelectrónico. 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The present invention is a sensor (1) of capacitive pressure with reference capacitances (13, 13 '), capable of being integrated monolithically in a microelectronic circuit. This pressure sensor (1) comprises: a first sensor electrode (9) inserted in a layer of insulating material where also the reference capacitances (13, 13 '), two reference electrodes (10, 10') separated between they by the first sensor electrode (9), a hermetic cavity (12) superimposed on the first sensor electrode (9), two connecting walls (11) that confine the first electrode (9), to the two reference electrodes (10, 10 ') and the hermetic cavity (12), wherein this hermetic cavity (12) is covered by a second sensor electrode (8) which, when deformed by an external force, varies the capacitance. (Machine-translation by Google Translate, not legally binding)
Sensor de presión capacitivo con capacitancias de referencia y método de obtención del mismo. La presente invención es un sensor (1) de presión capacitivo con capacitancias de referencia (13, 13'), susceptible de ser integrado monolíticamente en un circuito microelectrónico. Este sensor (1) de presión comprende: un primer electrodo sensor (9) insertado en una capa de material aislante donde también se encuentran las capacitancias de referencia (13, 13'), dos electrodos de referencia (10, 10') separados entre ellos por el primer electrodo sensor (9), una cavidad hermética (12) sobrepuesta al primer electrodo sensor (9), dos muros de conexión (11) que confinan al primer electrodo (9), a los dos electrodos de referencia (10, 10') y a la cavidad hermética (12), en donde esta cavidad hermética (12) está cubierta por un segundo electrodo sensor (8) que cuando es deformado por una fuerza externa varía la capacitancia.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING |
| title | Capacitive pressure sensor with reference capacitances and method of obtaining the same (Machine-translation by Google Translate, not legally binding) |
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