Procedimiento y dispositivo para el tratamiento con plasma por el lado interior de cuerpos huecos
Procedimiento para el tratamiento con plasma de unas piezas de trabajo en forma de cuerpos huecos, en el que dentro de una cámara del reactor es puesta en vacío por lo menos parcialmente una zona de tratamiento, un gas de proceso se introduce en la zona de tratamiento, en particular en la pieza de t...
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| creator | BICKER, MATTHIAS LOHMEYER, MANFRED HORMES, ROBERT |
| description | Procedimiento para el tratamiento con plasma de unas piezas de trabajo en forma de cuerpos huecos, en el que dentro de una cámara del reactor es puesta en vacío por lo menos parcialmente una zona de tratamiento, un gas de proceso se introduce en la zona de tratamiento, en particular en la pieza de trabajo, y mediante una energía electromagnética irradiada se genera un plasma en el entorno de por lo menos una parte de la superficie de la pieza de trabajo, caracterizado por que el plasma durante una excitación de un gas mediante una descarga de efluvios se inflama en un recinto (28) separado de la cámara (2) del reactor mediante una irradiación de energía electromagnética en el gas de proceso introducido y por que el gas de proceso durante el tratamiento con plasma circula a través de la zona de tratamiento entre extremos opuestos de la zona.
The invention relates to a method for the plasma treatment of workpieces, particularly workpieces in the form of hollow bodies, in which a treatment zone in a reactor chamber is at least partially evacuated, a process gas is introduced into the treatment zone, particularly into the cavity of the workpiece, and a plasma is ignited by means of injected electromagnetic energy in the process gas introduced into the treatment zone, wherein the process gas flows through the treatment zone between opposite ends of the zone during the plasma treatment. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_ES2539397TT3</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>ES2539397TT3</sourcerecordid><originalsourceid>FETCH-epo_espacenet_ES2539397TT33</originalsourceid><addsrcrecordid>eNqNjEEKAjEMRbtxIeod4gHcWERmLSMuBbsfQhsx0GlKmhG8vSPMAVx9eO_x1w7vKpESj0zFBD6QuFVpbPwWqKgIlMEUDZciSoGasY0IVfRnMyYBLkbKM0gEcSKdP-A1UZS2dasn5ka7ZTduf-3D5XagKgO1ipEK2dA_jiff-e4cgvf_NF9E3D54</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Procedimiento y dispositivo para el tratamiento con plasma por el lado interior de cuerpos huecos</title><source>esp@cenet</source><creator>BICKER, MATTHIAS ; LOHMEYER, MANFRED ; HORMES, ROBERT</creator><creatorcontrib>BICKER, MATTHIAS ; LOHMEYER, MANFRED ; HORMES, ROBERT</creatorcontrib><description>Procedimiento para el tratamiento con plasma de unas piezas de trabajo en forma de cuerpos huecos, en el que dentro de una cámara del reactor es puesta en vacío por lo menos parcialmente una zona de tratamiento, un gas de proceso se introduce en la zona de tratamiento, en particular en la pieza de trabajo, y mediante una energía electromagnética irradiada se genera un plasma en el entorno de por lo menos una parte de la superficie de la pieza de trabajo, caracterizado por que el plasma durante una excitación de un gas mediante una descarga de efluvios se inflama en un recinto (28) separado de la cámara (2) del reactor mediante una irradiación de energía electromagnética en el gas de proceso introducido y por que el gas de proceso durante el tratamiento con plasma circula a través de la zona de tratamiento entre extremos opuestos de la zona.
The invention relates to a method for the plasma treatment of workpieces, particularly workpieces in the form of hollow bodies, in which a treatment zone in a reactor chamber is at least partially evacuated, a process gas is introduced into the treatment zone, particularly into the cavity of the workpiece, and a plasma is ignited by means of injected electromagnetic energy in the process gas introduced into the treatment zone, wherein the process gas flows through the treatment zone between opposite ends of the zone during the plasma treatment.</description><language>spa</language><subject>ACOUSTICS ; ACOUSTICS NOT OTHERWISE PROVIDED FOR ; BASIC ELECTRIC ELEMENTS ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL ; MUSICAL INSTRUMENTS ; PHYSICS ; PLASMA TECHNIQUE ; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS ; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS ; SOUND-PRODUCING DEVICES ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150630&DB=EPODOC&CC=ES&NR=2539397T3$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25544,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150630&DB=EPODOC&CC=ES&NR=2539397T3$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BICKER, MATTHIAS</creatorcontrib><creatorcontrib>LOHMEYER, MANFRED</creatorcontrib><creatorcontrib>HORMES, ROBERT</creatorcontrib><title>Procedimiento y dispositivo para el tratamiento con plasma por el lado interior de cuerpos huecos</title><description>Procedimiento para el tratamiento con plasma de unas piezas de trabajo en forma de cuerpos huecos, en el que dentro de una cámara del reactor es puesta en vacío por lo menos parcialmente una zona de tratamiento, un gas de proceso se introduce en la zona de tratamiento, en particular en la pieza de trabajo, y mediante una energía electromagnética irradiada se genera un plasma en el entorno de por lo menos una parte de la superficie de la pieza de trabajo, caracterizado por que el plasma durante una excitación de un gas mediante una descarga de efluvios se inflama en un recinto (28) separado de la cámara (2) del reactor mediante una irradiación de energía electromagnética en el gas de proceso introducido y por que el gas de proceso durante el tratamiento con plasma circula a través de la zona de tratamiento entre extremos opuestos de la zona.
The invention relates to a method for the plasma treatment of workpieces, particularly workpieces in the form of hollow bodies, in which a treatment zone in a reactor chamber is at least partially evacuated, a process gas is introduced into the treatment zone, particularly into the cavity of the workpiece, and a plasma is ignited by means of injected electromagnetic energy in the process gas introduced into the treatment zone, wherein the process gas flows through the treatment zone between opposite ends of the zone during the plasma treatment.</description><subject>ACOUSTICS</subject><subject>ACOUSTICS NOT OTHERWISE PROVIDED FOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL</subject><subject>MUSICAL INSTRUMENTS</subject><subject>PHYSICS</subject><subject>PLASMA TECHNIQUE</subject><subject>PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS</subject><subject>PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</subject><subject>SOUND-PRODUCING DEVICES</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjEEKAjEMRbtxIeod4gHcWERmLSMuBbsfQhsx0GlKmhG8vSPMAVx9eO_x1w7vKpESj0zFBD6QuFVpbPwWqKgIlMEUDZciSoGasY0IVfRnMyYBLkbKM0gEcSKdP-A1UZS2dasn5ka7ZTduf-3D5XagKgO1ipEK2dA_jiff-e4cgvf_NF9E3D54</recordid><startdate>20150630</startdate><enddate>20150630</enddate><creator>BICKER, MATTHIAS</creator><creator>LOHMEYER, MANFRED</creator><creator>HORMES, ROBERT</creator><scope>EVB</scope></search><sort><creationdate>20150630</creationdate><title>Procedimiento y dispositivo para el tratamiento con plasma por el lado interior de cuerpos huecos</title><author>BICKER, MATTHIAS ; LOHMEYER, MANFRED ; HORMES, ROBERT</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_ES2539397TT33</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>spa</language><creationdate>2015</creationdate><topic>ACOUSTICS</topic><topic>ACOUSTICS NOT OTHERWISE PROVIDED FOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL</topic><topic>MUSICAL INSTRUMENTS</topic><topic>PHYSICS</topic><topic>PLASMA TECHNIQUE</topic><topic>PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS</topic><topic>PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</topic><topic>SOUND-PRODUCING DEVICES</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>BICKER, MATTHIAS</creatorcontrib><creatorcontrib>LOHMEYER, MANFRED</creatorcontrib><creatorcontrib>HORMES, ROBERT</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>BICKER, MATTHIAS</au><au>LOHMEYER, MANFRED</au><au>HORMES, ROBERT</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Procedimiento y dispositivo para el tratamiento con plasma por el lado interior de cuerpos huecos</title><date>2015-06-30</date><risdate>2015</risdate><abstract>Procedimiento para el tratamiento con plasma de unas piezas de trabajo en forma de cuerpos huecos, en el que dentro de una cámara del reactor es puesta en vacío por lo menos parcialmente una zona de tratamiento, un gas de proceso se introduce en la zona de tratamiento, en particular en la pieza de trabajo, y mediante una energía electromagnética irradiada se genera un plasma en el entorno de por lo menos una parte de la superficie de la pieza de trabajo, caracterizado por que el plasma durante una excitación de un gas mediante una descarga de efluvios se inflama en un recinto (28) separado de la cámara (2) del reactor mediante una irradiación de energía electromagnética en el gas de proceso introducido y por que el gas de proceso durante el tratamiento con plasma circula a través de la zona de tratamiento entre extremos opuestos de la zona.
The invention relates to a method for the plasma treatment of workpieces, particularly workpieces in the form of hollow bodies, in which a treatment zone in a reactor chamber is at least partially evacuated, a process gas is introduced into the treatment zone, particularly into the cavity of the workpiece, and a plasma is ignited by means of injected electromagnetic energy in the process gas introduced into the treatment zone, wherein the process gas flows through the treatment zone between opposite ends of the zone during the plasma treatment.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | ACOUSTICS ACOUSTICS NOT OTHERWISE PROVIDED FOR BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING,NOISE OR OTHER ACOUSTIC WAVES IN GENERAL MUSICAL INSTRUMENTS PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SOUND-PRODUCING DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Procedimiento y dispositivo para el tratamiento con plasma por el lado interior de cuerpos huecos |
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