A HYBRID SILICON PHOTONICS MODULATOR AND METHOD TO MANUFACTURE THE SAME

The present disclosure relates generally to a hybrid modulator and methods of integrating hybrid materials, such as lithium-niobate-on-insulator, onto silicon-on-insulator (SOI) wafers for hybrid silicon photonics integration, while maintaining compatibility with standard silicon photonics component...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LUO, Xianshu, LO, Patrick Guo Qiang, SIEW, Shawn Yohanes
Format: Patent
Sprache:eng ; fre ; ger
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