GROUP III-V COMPOUND SEMICONDUCTOR SINGLE CRYSTAL SUBSTRATE AND PRODUCTION METHOD THEREFOR

The group III-V compound semiconductor single crystal substrate has a circular main surface, wherein the main surface has an orientation flat or a notch and has a first region that is inside a first virtual line passing through a point 5 mm away inward from an outer periphery thereof, and a first re...

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Bibliographische Detailangaben
Hauptverfasser: UEMATSU, Koji, NAKANISHI, Fumitake, NODA, Kazuki
Format: Patent
Sprache:eng ; fre ; ger
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