PACKAGE SUBSTRATES WITH EMBEDDED DIE-SIDE, FACE-UP DEEP TRENCH CAPACITOR(S) (DTC(S)), AND RELATED INTEGRATED CIRCUIT (IC) PACKAGES AND FABRICATION METHODS
Integrated circuit (IC) packages employing a package substrate with embedded deep trench capacitor(s) (DTC(s)) face-up to a semiconductor die ("die") for connection, and related fabrication methods. A DTC is embedded in a cavity in the package substrate and coupled to a die. To minimize co...
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