REFERENCE MARKERS ADJACENT TO A CAVITY IN A PHOTONICS CHIP

Structures including a cavity adjacent to an edge coupler and methods of forming such structures. The structure comprises a semiconductor substrate including a cavity with a sidewall, a dielectric layer on the semiconductor substrate, and an edge coupler on the dielectric layer. The structure furthe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NUMMY, Karen, DEZFULIAN, Kevin, DONEGAN, Keith, HOUGHTON, Thomas, HIROKAWA, Takako, BIAN, Yusheng
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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