SEMICONDUCTOR DEVICES AND DATA STORAGE SYSTEMS INCLUDING THE SAME

A semiconductor device includes a plate layer, gate electrodes and interlayer insulating layers alternately stacked on the plate layer in a first direction perpendicular to an upper surface of the plate layer and forming a first stack structure and a second stack structure on the first stack structu...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHUNG, Minkyu, KIM, Seungyoon, LEE, Sangjae, HAN, Jeehoon, LIM, Juyoung, KIM, Heesuk, LEE, Jaehoon, CHUN, Sanghun, LEE, Hyemi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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