SYSTEMS AND METHODS FOR FABRICATION OF SUPERCONDUCTING INTEGRATED CIRCUITS

Various techniques and apparatus permit fabrication of superconductive circuits. A superconducting integrated circuit comprising a superconducting stud via, a kinetic inductor, and a capacitor may be formed. Forming a superconducting stud via in a superconducting integrated circuit may include maski...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HUANG, Shuiyuan, WHITTAKER, Jed D, STADTLER, Douglas P, ALTOMARE, Fabio, STERPKA, Edward G, HARRIS, Richard G, LADIZINSKY, Nicolas C, OH, Byong H, YAO, Jason J, LADIZINSKY, Eric G, BUNYK, Paul I, SWENSON, Loren J, ENDERUD, Colin C
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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