ACOUSTIC CARRIER HEAD MONITORING

A chemical mechanical polishing apparatus has a platen to support a polishing pad, a carrier head comprising a rigid housing and configured to hold a surface of a substrate against the polishing pad, a motor to generate relative motion between the platen and the carrier head so as to polish the subs...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HU, Yufei, TANG, Jianshe, OH, Jeonghoon, SHEN, Shih-Haur, BROWN, Brian J, DESAI, Rushabhkumar, ZUNIGA, Steven M, NAGENGAST, Andrew J, WITTY, Derek R, WU, Haosheng
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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