CHARGED PARTICLE-OPTICAL APPARATUS

An electron-optical projection device for projecting a plurality of charged particle beams towards a sample, the device comprising:a stack of plates comprising beam directing elements configured to project the plurality of charged particle beams towards a sample location on the sample,wherein at lea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SLOT, Erwin, SAHIN, Ezgi, AKBULUT, Duygu, WIELAND, Marco, Jan-Jaco, PELLEMANS, Henricus, Petrus, Maria, KUIPER, Vincent, Sylvester, VAN ENGELEN, Jorn, Paul
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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Beschreibung
Zusammenfassung:	An electron-optical projection device for projecting a plurality of charged particle beams towards a sample, the device comprising:a stack of plates comprising beam directing elements configured to project the plurality of charged particle beams towards a sample location on the sample,wherein at least one plate of the stack comprises a planar optical member configured to direct stimulation light towards the sample location so that the stimulation light is coincident with the plurality of charged particle beams, desirably coincident with the paths of the plurality of charged particle beams towards the sample location, desirably in the at least one plate comprising an optical member is defined a plurality of apertures for respective paths of a plurality charged particle beams.