IMPEDANCE MATCHING IN A RF POWER GENERATION SYSTEM

An impedance matching network including a mixing module. The mixing module receives a plurality admittances based upon at least one parameter sensed from an output which generated by an RF generator. The output signal is a pulsed RF signal having a plurality of states for each pulse and the pluralit...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM, Kwang Ho, JUNG, Jaechul, LEE, Hohyoung, LEE, Changhee, KIM, Jongmin
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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