LAMINATE, RELEASE AGENT COMPOSITION, AND METHOD FOR MANUFACTURING PROCESSED SEMICONDUCTOR SUBSTRATE

There is a laminate including:a semiconductor substrate;a support substrate that is light-transmissive; andan adhesive layer and a release layer provided between the semiconductor substrate and the support substrate,the laminate being used when the release layer absorbs light irradiated from a side...

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Bibliographische Detailangaben
Hauptverfasser: KISHIOKA, Takahiro, OKUNO, Takahisa, SHINJO, Tetsuya
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
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