LAMINATE, RELEASE AGENT COMPOSITION, AND METHOD FOR MANUFACTURING PROCESSED SEMICONDUCTOR SUBSTRATE
There is a laminate including:a semiconductor substrate;a support substrate that is light-transmissive; andan adhesive layer and a release layer provided between the semiconductor substrate and the support substrate,the laminate being used when the release layer absorbs light irradiated from a side...
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Sprache: | eng ; fre ; ger |
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