MICROELECTRONIC DEVICES INCLUDING STAIR STEP STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS
A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack stru...
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| creator | VADIVEL, Shruthi Kumara BARCLAY, Martin, J ZHANG, Xiaosong PETERSON, Joel, D ONG, Biow Hiem OLSON, Adam, L ZHAO, Bo REECE, Jason PARK, Matthew KEWLEY, David, A GOSSMAN, Michael, J XU, Lifang YOW, Zhen Feng DORHOUT, Justin, B KING, Matthew, J CHOOI, Kah Sing TRAN, Tien Minh Quan |
| description | A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls. |
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| title | MICROELECTRONIC DEVICES INCLUDING STAIR STEP STRUCTURES, AND RELATED ELECTRONIC SYSTEMS AND METHODS |
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