METHOD FOR AUTO-TUNING AND PROCESS PERFORMANCE ASSESSMENT OF CHAMBER CONTROL

METHOD FOR AUTO-TUNING AND PROCESS PERFORMANCE ASSESSMENT OF CHAMBER CONTROL

Embodiments disclosed herein include a method for auto-tuning a system. In an embodiment, the method comprises determining if the system is in a steady state. Thereafter, the method includes exciting the system. In an embodiment, the method comprises storing process feedback measurements from the ex...

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Hauptverfasser: CIMINO, Mauro, BALUJA, Sanjeev, DAN, Arkaprava
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
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creator CIMINO, Mauro
BALUJA, Sanjeev
DAN, Arkaprava
description Embodiments disclosed herein include a method for auto-tuning a system. In an embodiment, the method comprises determining if the system is in a steady state. Thereafter, the method includes exciting the system. In an embodiment, the method comprises storing process feedback measurements from the excited system to provide a set of stored data. In an embodiment, the set of stored data is a subset of all available data generated by the excited system. In an embodiment, the method further comprises determining when the excited system returns to the steady state, and tuning the system using the set of stored data.
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subjects CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
title METHOD FOR AUTO-TUNING AND PROCESS PERFORMANCE ASSESSMENT OF CHAMBER CONTROL
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