METHOD AND SYSTEM FOR IMAGING SUBSURFACE FEATURES INSIDE A SUBSTRATE

METHOD AND SYSTEM FOR IMAGING SUBSURFACE FEATURES INSIDE A SUBSTRATE

A method and system for imaging subsurface features (Sf) below a surface (Ss) of a substrate (S). Acoustic waves (W) are generated and scattered from the subsurface features (Sf) inside the substrate (S). A beam of probe light (Lpr) interacts with a probe region (Spr) of the substrate (S) traversed...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VAN NEER, Paul Louis Maria Joseph, BÄUMER, Stefan Michael Bruno
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A method and system for imaging subsurface features (Sf) below a surface (Ss) of a substrate (S). Acoustic waves (W) are generated and scattered from the subsurface features (Sf) inside the substrate (S). A beam of probe light (Lpr) interacts with a probe region (Spr) of the substrate (S) traversed by the acoustic waves (W) scattering from the subsurface features (Sf). The subsurface features (Sf) are imaged based on a modulation of the probe light (Lpr) caused by the interaction with the acoustic waves (W) in the probe region (Spr). The probe light (Lpr) is focused onto the substrate (S) via a microlens (11) generating a photonic jet (Lj) with a focal region coinciding with the probe region (Spr). This may photonic jet (Lj) may provide a relatively small focus thereby improving lateral resolution for measuring the subsurface features (Sf) via acoustic waves (W).