MICRO-FABRICATED DEVICE FOR CONTROLLING TRAPPED IONS AND METHOD OF MANUFACTURING THE SAME BY MICRO-FABRICATION
A device (100) for controlling trapped ions (180) includes a first semiconductor substrate (120) comprising a semiconductor and/or dielectric material. A first micro-fabricated electrode structure (125) is disposed at a main side of the first substrate. The device further includes a second substrate...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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